JPH02137030U - - Google Patents
Info
- Publication number
- JPH02137030U JPH02137030U JP4348789U JP4348789U JPH02137030U JP H02137030 U JPH02137030 U JP H02137030U JP 4348789 U JP4348789 U JP 4348789U JP 4348789 U JP4348789 U JP 4348789U JP H02137030 U JPH02137030 U JP H02137030U
- Authority
- JP
- Japan
- Prior art keywords
- wafer chuck
- resist
- carrier
- semiconductor substrate
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348789U JPH0644095Y2 (ja) | 1989-04-12 | 1989-04-12 | レジスト塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4348789U JPH0644095Y2 (ja) | 1989-04-12 | 1989-04-12 | レジスト塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02137030U true JPH02137030U (en]) | 1990-11-15 |
| JPH0644095Y2 JPH0644095Y2 (ja) | 1994-11-14 |
Family
ID=31555935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4348789U Expired - Lifetime JPH0644095Y2 (ja) | 1989-04-12 | 1989-04-12 | レジスト塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644095Y2 (en]) |
-
1989
- 1989-04-12 JP JP4348789U patent/JPH0644095Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644095Y2 (ja) | 1994-11-14 |
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